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Synonyms: Perfluoropropane, C3F8, Flutec PP30
CAS Number : 76-19-7
Description & Characteristics
Octafluoropropane, C3F8 is a fully-fluorinated, odourless, colourless compressed gas.
Compatibility with most construction materials.
No residue on evaporation.
Octafluoropropane is used extensively in semiconductor manufacture in etching processes and chemical vapour deposition (CVD) chamber cleaning to remove dielectric film build up. In a plasma with oxygen, it generates a variety of reactive species that breakdown chemical deposits to make volatile products, which are readily removed under vacuum. Its cleaning effect is comparable to that of C2F6, but with significantly lower gas usage (up to 50%), offering important economic and environmental advantages.
It is also used in contrast imaging applications and as an evaporative cooling fluid.
Typical Physical Properties
Vapour Pressure @ 21.1͍
Absolute Density, Gas @ 101.325 kPa, 20°C
Relative Density, Gas @ 101.325 kPa, 20°C
Density Liquid @ Saturation Pressure, 20°C
Critical Compressability Factor
Viscosity, Gas @ 101.325 kPa, 25°C
0.01454 mPa s
Typical Thermosphysical Properties
Molar Specific Heat, Gas @ 101.325 kPa
145.1 J/(mol.K) @10°C - 156.0 J/(mol.K) @50°C
Thermal Conductivity, Gas @ 101.325 kPa;25°C
Latent Heat of Vaporisation
19.7 kJ/mol @ -36.7°C - 16.8 kJ/mol @ 0.0°C
Heat Capacity, Ideal Gas @ 25°C
The above typical physical properties, in no way form or represent product specification
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