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Octafluoropropane

Synonyms: Perfluoropropane, C3F8, Flutec PP30

CAS Number : 76-19-7

Description & Characteristics

Octafluoropropane, C3F8 is a fully-fluorinated, odourless, colourless compressed gas

  • Compatibility with most construction materials
  • Practically non-toxic1
  • Non-flammability
  • No residue on evaporation

  • Applications

    Octafluoropropane is used extensively in semiconductor manufacture in etching processes and chemical vapour deposition (CVD) chamber cleaning to remove dielectric film build up. In a plasma with oxygen, it generates a variety of reactive species that breakdown chemical deposits to make volatile products, which are readily removed under vacuum. Its cleaning effect is comparable to that of C2F6, but with significantly lower gas usage (up to 50%), offering important economic and environmental advantages.

    It is also used in contrast imaging applications and as an evaporative cooling fluid.

    Specification

    We tailor our product to our customer's requirements and manufacture several grades of C3F8

    Our standard grade is 99.96% min and we can achieve 99.999% min if required.

    Packaging

    • Disposable cylinders 0.9 kg, 2.2 kg 10 kg
    • 10 – 100 kg DOT Cylinders
    • 500 kg, 1000 kg drums
    • Isotanks
    • We happily fill our customers own branded cylinders.

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